|Jan. 18 (Wed) - Jan. 20 (Fri), 2012
10:00 a.m - 6:00 p.m(Only 20th is until 5:00 p.m)
|East Exhibition Hall 5, Tokyo Big Sight,
Industrical Co., Ltd will exhibit this exhibition in the Shizuoka
prefecture booh. We will propose innovative optical measurement technology
based on our experience. Pulstec Industrial Co., Ltd will exhibit
in Shizuoka prefecture booth which theme. We look forward to meeting
you at the show. Please feel free to contact us if you have any inquiry
about our system.
Wavefront sensor:PWS-1000 DUV
Sensor can measure the laser source, lens, system which is used for
DUV, such as ArF(193nm), KrF(248nm) excimer laser.
Waviness measurement system:LUCAS-Nuk
measurement system can measure the nanometer size waviness on the
wafer or glass surface by checking its reflectivity based on our original
sensing method. The system can measure the faster and larger by adopting
the large diameter sensor.